Book/Report

FZJ-2017-03641

http://join2-wiki.gsi.de/foswiki/pub/Main/Artwork/join2_logo100x88.png On the mechanism of sputtering

Lehmann, C.FZJ* ; Sigmund, P.FZJ*

1966
Kernforschungsanlage Jülich, Verlag Jülich

Please use a persistent id in citations: http://hdl.handle.net/2128/14497

Report No.: Juel-0415-RW

Abstract: lt is shown that spot patterns in single crystal sputtering do not necessarily arise as a consequence of focused collision sequences. Spots can be obtained if it is assumed that only the surface of a solid has a regular structure. The spot width is determined by theenergy distribution in the collision cascade and the potential barrier at the surface. The contribution of focusons to sputtering is negligible at low bombarding energies because of the small penetration depth of the ions. Recent experimental results indicate that the average pa thlength offocusons contributing to sputtering is extremely small even at high bombarding energies, so that the proposed sputtering mechanism should be dominant over the whole ener'gy range. This result appears to be consistent with collision cascade theory if forward scattering is taken into account.

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Contributing Institute(s):

1. Publikationen vor 2000 (PRE-2000)

Research Program(s):

1. 899 - ohne Topic (POF3-899) (POF3-899)

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Database coverage:

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